Critical analysis of short-term negative bias temperature instability measurements: Explaining the effect of time-zero delay for on-the-fly measurements

Recently several groups have used the reaction-diffusion R-D model with H2 diffusion in interpreting negative bias temperature Instability NBTI degradation. While the classical “H2 R-D” model can interpret long-term NBTI behavior, it is inconsistent with short-term stress data obtained by recently developed ultrafast measurements and widely used on-the-fly measurements. Moreover, experimental data from various techniques are not consistent with each other. Here, the authors show that the H2 R-D model must be generalized to consistently interpret NBTI at all time scales. The generalized model highlights the previously unappreciated role of time-zero delay in reconciling differences among the so-called delay-free on-the-fly measurements. © 2007 American Institute of Physics. DOI: 10.1063/1.2695998